Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We consider the orthgonal clipping problem in a set of segments: Given a set of n segments in d-dimensional space, we preprocess them into a data structure such that given an orthogonal query window, the segments intersecting it can be counted/reported efficiently. We show that the efficiency of the data structure significantly depends on a geometric discrete parameter K named the projected-image complexity, which becomes Θ (n2) in the worst case but practically much smaller. If we use O(m) space, where K log4d-7 n ≥ m ≥ n log4d-7 n, the query time is O((K/m)1/2 logmax{4,4d-5} n). This is near to an Ω((K/m)1/2) lower bound.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Hannaneh Hajishirzi, Julia Hockenmaier, et al.
UAI 2011
D.S. Turaga, K. Ratakonda, et al.
SCC 2006
J. LaRue, C. Ting
Proceedings of SPIE 1989