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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Patterning damage in narrow trackwidth spin-valve sensors
Abstract
Patterning damage in narrow trackwidth spin-valve sensors was studied. The resistance of the sensors increased with the width, while the giant magnetoresistance (GMR) ratio decreased with decreasing width. It was found that sensors patterned using a focused Ar ion beam showed a similar but much greater effect.
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