PaperContrast Enhancement and Resist Wall Profile Control by Surface CrosslinkageH. HiraokaJ. Photopolym. Sci. Tech.
Conference paperSub-halfmicron negative resist systems by image reversalK. Chiong, H. HiraokaProceedings of SPIE 1989
Conference paperA simple metal pn polymer process using pulsed electron beams in soft vacuumJ. Krishnaswamy, Mark Eyolfson, et al.Proceedings of SPIE 1989