Conference paperA simple metal pn polymer process using pulsed electron beams in soft vacuumJ. Krishnaswamy, Mark Eyolfson, et al.Proceedings of SPIE 1989
Conference paperHigh resolution polymer pattern fabrications with Low energy proton beamsH. HiraokaMicrolithography 1984
PaperAll Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related PolymersH. HiraokaJES