Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Photon-gated spectral holeburning uses two photons to bleach a narrow hole in an inhomogeneously broadened absorption. A brief review is given of the inorganic and organic materials known to exhibit this phenomenon, with emphasis on the inorganic systems BaClF+, CaF2+, LiGa5O8+ and SrTiO3+. In all these cases photoionization of the impurity ion is believed to be the mechanism of photobleaching. © 1987.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
E. Burstein
Ferroelectrics