Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
No abstract available.
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
J.H. Stathis, R. Bolam, et al.
INFOS 2005
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films