Strong and flexible domain typing for dynamic E-business
Yigal Hoffner, Simon Field, et al.
EDOC 2004
We are inspired by the beauty and simplicity of self-organizing materials and the promise they hold for enabling continued improvements in semiconductor technology. Self assembly is the spontaneous arrangement of individual elements into regular patterns; under suitable conditions, certain Materials self organize into useful nanometer-scale patterns of importance to high-performance microelectronics applications. Polymer self assembly is a nontraditional approach to patterning integrated circuit elements at dimensions and densities inaccessible to traditional lithography methods. We review here our efforts in IBM to develop and integrate self-assembly processes as high-resolution patterning alternatives and to demonstrate targeted applications in semiconductor device fabrication. We also provide a framework for understanding key requirements for the adoption of polymer self-assembly processes into semiconductor technology, as well as a discussion of the ultimate dimensional scalability of the technique. © Copyright 2007 by International Business Machines Corporation.
Yigal Hoffner, Simon Field, et al.
EDOC 2004
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002
Charles H. Bennett, Aram W. Harrow, et al.
IEEE Trans. Inf. Theory
Reena Elangovan, Shubham Jain, et al.
ACM TODAES