B.S. Meyerson, M.L. Yu
International Conference on Chemical Vapor Deposition 1983
Normalized ionization probabilities α+ are reported for binary Fe-Ni alloys under O+2 bombardment at a 45° incidence angle. It is shown that the dependence of α+ on the composition is much smaller than at normal incidence. Photoemission spectroscopy reveals that both nickel and iron remain essentially metallic under oblique-incidence bombardment, whereas almost complete oxidation occurs at normal incidence. This is attributed to our observation that sputter yields under oxygen bombardment increase much faster than cos α-1.
B.S. Meyerson, M.L. Yu
International Conference on Chemical Vapor Deposition 1983
A. Närmann, M.L. Yu
Surface Science
A. Wucher, W. Reuter
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
V. Marrello, L. Samuelson, et al.
Journal of Applied Physics