William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Paper
Presentation of the Bingham Medal to Clarence M. Zener
Related
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011