Mihail P. Petkov, Marc H. Weber, et al.
Applied Physics Letters
We have measured uncapped mesoporous low-dielectric-constant films using positron annihilation lifetime spectroscopy (PALS), a nondestructive technique, which yields both pore-size distributions and the threshold for pore interconnectivity. Pairs of fully cured capped and uncapped identical films, initially containing 5%-50% porogen additions, exhibited similar signatures in PALS, establishing a technique in which film capping is unnecessary. We also found that it was possible to distinguish between closed and percolated pores, without film capping, by comparing lifetime spectra of a film taken using different detector configurations. Interconnected pores were observed in cured samples, which had greater than 20% porogen additions. © 2000 American Institute of Physics.
Mihail P. Petkov, Marc H. Weber, et al.
Applied Physics Letters
Mihail P. Petkov, Marc H. Weber, et al.
Journal of Applied Physics
Mihail P. Petkov, Kelvin G. Lynn, et al.
IEEE TNS
Mihail P. Petkov, Marc H. Weber, et al.
Journal of Applied Physics