Thomas H. Baum, Paul B. Comita
Thin Solid Films
Gold micropatterns have been generated by the laser photolysis of dimethylgold (III) acetylacetonate, Me2Au(acac), in the vapor phase. Linewidths as fine as 2 μm were readily obtained utilizing a simple optical projection system comprised of a 4× projection lens, a lithographic photomask, and the UV output from an excimer laser. The single-step, dry process for selectively producing metal patterns is highlighted.
Thomas H. Baum, Paul B. Comita
Thin Solid Films
Mahesh G. Samant, Clifford J. Robinson, et al.
Journal of Non-Crystalline Solids
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Proceedings of SPIE 1989
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Journal of the Chemical Society, Dalton Transactions