Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
It is shown that multiply connected perimeter contacts of a two-dimenisonal system in the quantized-Hall-effect (QHE) regime have two-terminal resistance values equal to a well-defined rational fraction of he2, depending on the interconnection configurations. A phenomenological model is presented to account for the results which is consistent with quantized dissipation in the vicinity of current-carrying contacts. It is further demonstrated that the interior of the system is dissipationless and the effect is not affected by the inclusion of macroscopic inhomogeneities. © 1984 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Ellen J. Yoffa, David Adler
Physical Review B