Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
CH2 radicals and C2H4 molecules are produced and desorbed from an A1 surface with a submonolayer coverage of CH2I2 when the adsorbed molecules are excited by 308-nm laser pulses. In contrast, laserinduced substrate heating by 532-nm pulses causes desorption of CH2I2 molecules and some thermal decomposition to form CH2I and I species. The results clearly illustrate the distinctive photochemical and thermal effects on a metal surface irradiated by lasers at different wavelengths. © 1989, American Vacuum Society. All rights reserved.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989