Ralph H. Page, Christopher S. Gudeman
The Journal of Chemical Physics
We have developed a radiofrequency sputter source using a 13.56 MHz transmitter and operating in the pressure range 2-100 mTorr. Absorption, emission, and laser-induced fluorescence spectroscopies have been used to characterize the number densities and temperatures of metal atoms and molecules in the discharge. With an iron target, at a pressure of 100 mTorr, the ground-state iron atom density is 2 × 1012 cm-3, with a translational temperature below 800 K. We estimate a number density of copper dimers of 1010-1011 cm-3 when sputtering a copper target at this pressure, and find a rotational temperature of about 500 K. As an example of the source's utility, a rotationally resolved spectrum of the Cu2 C↔X transition is analyzed to yield the excited-state symmetry and rotational constants. © 1990.
Ralph H. Page, Christopher S. Gudeman
The Journal of Chemical Physics
Ralph H. Page, Christopher S. Gudeman
The Journal of Chemical Physics
Ralph H. Page, Christopher S. Gudeman
Journal of the Optical Society of America B: Optical Physics
Ralph H. Page, Christopher S. Gudeman, et al.
Journal of Applied Physics