A.P. Ghosh, J.E. Hurst Jr.
Journal of Applied Physics
Results are presented on the observation of 5 μm×5 μm defects in a similar size periodic structure using self-pumping in a 5 mm×6 mm×5 mm barium titanate crystal and optics of NA ≈ 0.1 Signal-to-noise ratios in excess of 10:1 have been obtained, indicating that smaller sizes can be detected using a larger crystal and optics with higher NA without the need to magnify the object mask. The self-pumping geometry is useful in simplifying the experimental setup. © 1990.
A.P. Ghosh, J.E. Hurst Jr.
Journal of Applied Physics
R.R. Dube, D. Just, et al.
Proceedings of SPIE 1989
A.P. Ghosh, D.B. Dove
Microlithography 1992
M.C. Bashaw, T.P. Ma, et al.
Journal of the Optical Society of America B: Optical Physics