Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
The principle of the elastic equivalence of statically equivalent systems of load, or Saint-Venant's Principle, is given a precise mathematical formulation and proof. Counterexamples to traditional verbal statements of the principle are given, and the results are compared with previous mathematical work on the Saint-Venant principle. © 1965 Springer-Verlag.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998