S.M. Hu
Materials Science and Engineering R
By rheology experiments we show that the torque created by sliding friction between a polyurethane foam planarizing pad and patterned silicon dioxide wafer in contact creates a large second-order tensile normal force previously found only in the torsion of bulk specimens. The normal force is a linear function of the square of the torque. Such tensile force reduces the applied compressive force. With elaborate polishing experiments we found second-order normal extension of the polymer into the valleys of the opposing surface which by interlocking the interface may provide a new mechanism for friction. © 2003 Plenum Publishing Corporation.
S.M. Hu
Materials Science and Engineering R
A. Girlando, J.G. Gordon II, et al.
Surface Science
B.K. Furman, H.M. Clearfield, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
S.M. Rossnagel, Michael A. Russak, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films