J.W.M. Frenken, R.J. Hamers, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
By rheology experiments we show that the torque created by sliding friction between a polyurethane foam planarizing pad and patterned silicon dioxide wafer in contact creates a large second-order tensile normal force previously found only in the torsion of bulk specimens. The normal force is a linear function of the square of the torque. Such tensile force reduces the applied compressive force. With elaborate polishing experiments we found second-order normal extension of the polymer into the valleys of the opposing surface which by interlocking the interface may provide a new mechanism for friction. © 2003 Plenum Publishing Corporation.
J.W.M. Frenken, R.J. Hamers, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Julien Autebert, Aditya Kashyap, et al.
Langmuir
A. Ignatiev, F. Jona, et al.
Surface Science
Edward A. Whittaker, Gary C. Bjorklund
CLEO 1983