William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
A. Gangulee, F.M. D'Heurle
Thin Solid Films