W.X. Tang, C.X. Zheng, et al.
IBM J. Res. Dev
A theoretical model for step flow growth of multilayer films was investigated taking into account the interlayer step-step interaction induced by misfit strain. The model is used to simulate the growth of strain-compensated short-period superlattices. The improvement of step-bunch ordering in successive layers leads to self-organized growth of a lattice of quantum wires. The method is useful for fabricating quantum-wire superlattice and also effectively avoids dislocation formation.
W.X. Tang, C.X. Zheng, et al.
IBM J. Res. Dev
J. Schneir, R. Sonnenfeld, et al.
Physical Review B
J. Tersoff, R.S. Ruoff
Physical Review Letters
F.M. D'Heurle, J. Tersoff, et al.
Journal of Applied Physics