Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
A numerical algorithm for solving stiff boundary value problems with turning points is presented. The stiff systems are characterized as singularly perturbed differential equations. The numerical method is derived by appropriately discretizing the boundary layer and connection theory for such systems. Numerical results demonstrate the effectiveness of the method. In many cases the calculation proceeds with mesh increments which are orders of magnitude larger than those used by other known methods. © 1974, American Mathematical Society.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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