SGOI thinning and uniformity improvement using a fluoride GCIB process

U. Wieser, U. Kunze, et al.

Physica E: Low-Dimensional Systems and Nanostructures

M.A. Lutz, R.M. Feenstra, et al.

Surface Science

Mark A. Eriksson, Mark Friesen, et al.

Quantum Information Processing

M. Arafa, P. Fay, et al.

Electronics Letters