A.A. Lucas, H. Morawitz, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
An extremely simple, easily used system has been devised for the measurement of the dihedral angle between two plane faces on small specimens. The faces must be specular (rather than diffuse) reflectors, but may be quite lossy. Alignment criteria are extremely loose, but measurement precision is diffraction limited. The system will probably be of most use on objects of submillimeter dimensions © 1973 The American Institute of Physics.