Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A programming language is viewed as a language for expressing "instructions" for a computation to be performed by a particular machine. A class of abstract machines (which includes universal machines) is defined. These machines are viewed as devices which execute "instructions" expressed in programming languages. Using this model and an appropriate definition of a programming language, it is shown that there is at least one system of logic which has the following properties for all machines in this class.o(1) For three concepts of the equivalence of computations and of programs, this system can be used to show that two computations or programs are or are not equivalent.(2) Given a program and a finite number of functions, this system can be used to show that the program does or does not specify the computation of these functions. That is, it is shown that certain relations of equivalence among programs and the relation of a program to the functions whose computation it specifies probably obey the law of excluded middle in this system of logic. © 1970 Academic Press, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Amir Ali Ahmadi, Raphaël M. Jungers, et al.
SICON
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Michael E. Henderson
International Journal of Bifurcation and Chaos in Applied Sciences and Engineering