P.M. Mooney, J.L. Jordan-Sweet, et al.
Applied Physics Letters
Films of WSi2 initially deposited in an amorphous form have been known to display an unexpected resistivity maximum when annealed at a temperature corresponding to the transition from the low-temperature hexagonal structure to the high-temperature tetragonal structure. It is shown that the resistivity maximum is due to an extremely high (5×106/cm) density of stacking faults. Thus, at least one of the scattering defects which contribute to the relatively high resistivity of WSi2 films has been identified.
P.M. Mooney, J.L. Jordan-Sweet, et al.
Applied Physics Letters
R.V. Joshi, W. Hwang, et al.
ISLPED 2000
R.M. Tromp, G.W. Rubloff, et al.
Physical Review Letters
R.V. Joshi, L. Hsu, et al.
VMIC 1991