A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
No abstract available.
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007