Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Surfaces under stress (such as strained layers in heteroepitaxy) are unstable or metastable against morphological changes. This paper reviews recent progress in understanding such stress-induced roughening, and describes a few of the fascinating ways in which this instability can manifest itself.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME