Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The structure and magnetic properties of ultra-thin Fe spacer layers in epitaxially sputter-deposited Fe/Ni(0 0 1) multilayers are studied using X-ray diffraction and squid magnetometry, and compared to those of similarly deposited Fe/Ni81Fe19(0 0 1) multilayers. In both systems, the Fe layers undergo a similar sequence of structural changes with increasing Fe thickness, from a distorted FCC(0 0 1) phase, to a nearly relaxed FCC(0 0 1) phase, to a BCC(0 1 1) phase with concomitant changes in magnetic properties. © 1998 Elsevier Science B.V. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997