Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using the Chodorow potential we have conducted a band-by-band analysis of the structure in the photoemission from cesiated copper and have determined the location and extent k→ space of the optical transitions involved. We show that the Chodorow potential yields copper d bands accurate to 0.1 eV, that low-energy photons lead to transitions near the surface of the Brillouin zone, and that free-electron bands are responsible for very localized activity while d bands yield activity which is extended in k→ space. © 1973 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T.N. Morgan
Semiconductor Science and Technology
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Digital Discovery
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Journal of Polymer Science Part A: Polymer Chemistry