Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The Ge(111)-c(2×8) and the Si(111)-(7×7) reconstructions are directly compared by medium-energy ion scattering. The c(2×8) surface is shown to induce considerably less atomic displacements than the (7×7) structure. The data are in good agreement with a simple adatom model for the c(2×8) reconstructed surface. © 1988 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
A. Gangulee, F.M. D'Heurle
Thin Solid Films