Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
No abstract available.
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
R.W. Gammon, E. Courtens, et al.
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010