Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
The photo-induced absorption of λ = 1.3 μm light in an a-Si based waveguide is studied by means of excitation spectroscopy. At very high levels of the pump intensity the probe beam absorption tends to saturate. This phenomenon is related to high order recombination mechanisms. It is shown that the interface absorption makes a significant contribution to the absorption process. The experiments reveal the existence of localized interface states with energies which lie close to the mobility edges of a-Si and which are slightly different for the two interfaces.
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
T.N. Morgan
Semiconductor Science and Technology