Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We present a technique for approximating sequences of linear programs with varying right-hand sides and study the geometric properties of this approximation. Our approximation has an efficiency advantage over optimal solutions. When applied to deterministic control problems, the suggested technique outperforms the linear feedback model and provides accurate results (error of 5.8% in our numerical example). Numerical experience with stochastic models indicates that this approach may outperform the limited lookahead policies while maintaining low computational requirements.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Mario Blaum, John L. Fan, et al.
IEEE International Symposium on Information Theory - Proceedings
T. Graham, A. Afzali, et al.
Microlithography 2000
L Auslander, E Feig, et al.
Advances in Applied Mathematics