Summary abstract: Time-resolved study of oxygen reaction on si(100) surfaces using pulsed molecular beam reactive scattering

A. Reisman, M. Berkenblit, et al.

JES

Eloisa Bentivegna

Big Data 2022

William Hinsberg, Joy Cheng, et al.

SPIE Advanced Lithography 2010

Frank R. Libsch, Takatoshi Tsujimura

Active Matrix Liquid Crystal Displays Technology and Applications 1997