Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A chemical beam epitaxy system comprising low temperature effusion cells and a source of atomic oxygen has been developed for the preparation of cuprate thin films. Superconducting, smooth and single phase c-axis La2-xBaxCuO4 thin films have been grown using Cu(piv)2, La(piv)3 and Ba(thd)2 metallorganic precursors, demonstrating the viability of this inexpensive technique. © 1994.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
John G. Long, Peter C. Searson, et al.
JES
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting