William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A series of polyimides was synthesized to facilitate the study of several structure/property relationships, including relative permittivity, moisture absorption, free volume, and viscoelastic transitions. This series was based on hexafluoroisopropylidene bis(phthalic anhydride) and various diamines, with the intention of having a number of fluorine/hydrogen and symmetric/asymmetric analog sets. Since several of the fluorinated diamines were exceptionally unreactive, a multistep polycondensation polymerization technique was developed to obtain materials of sufficient molecular weight for property evaluation. Effects of fluorine incorporation on the aforementioned properties are reported. © 1994, American Chemical Society. All rights reserved.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P.C. Pattnaik, D.M. Newns
Physical Review B
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics