Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
New synthetic methods have been developed to alter the Ziegler procedure1 for synthesis of dilithiomethane of various isotopic compositions. [CH2(6Li2)]n has been prepared to facilitate solid 13C NMR spectra. (CD2Li2)n has been prepared, and preliminary X-ray powder pattern data are reported. The first solid-state 13C NMR spectrum on any organolithium compound has been obtained. The l3C NMR spectra of solid samples of [CH3(6Li)]4 and [CH2(6Li2)]n are discussed. © 1984, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997