Erich P. Stuntebeck, John S. Davis II, et al.
HotMobile 2008
In this work, we characterize MOS capacitors with HfO 2 gate dielectrics that utilize sulfur (S) passivation formed by pre-treatment of the Ge surface in an aqueous (NH 4 ) 2 S solution before HfO 2 deposition, and compare the results with those using the more-standard N-passivation. Using temperature-dependent admittance measurements, we find that the S-passivated samples have lower minimum D it and reduced flat-band shift, but also display larger accumulation dispersion and hysteresis than N-passivated samples. Results of admittance spectroscopy analysis also suggest that the energy distributions of the interface states are fundamentally different in the two sample types.
Erich P. Stuntebeck, John S. Davis II, et al.
HotMobile 2008
Pradip Bose
VTS 1998
Raymond Wu, Jie Lu
ITA Conference 2007
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum