MARS2: An advanced femtosecond laser mask repair tool
Alfred Wagner, Richard Haight, et al.
SPIE Photomask Technology 2002
The impact of thermal budget on La- and Al-induced dipoles is systematically investigated by femtosecond pump/probe photoelectron spectroscopy. We find that the La-induced dipole requires annealing at 300 °C for complete activation, whereas the Al-induced dipole is activated at the lower temperature but requires annealing at 300 °C to eliminate a counteracting sheet charge. When La and Al atoms coexist on a SiO2 surface, the La-induced dipole becomes dominative after a silicate-forming reaction at the temperature above 600 °C. This phenomenon is attributed to the different natures of the La- and Al-induced dipoles, i.e., long-range and short-range. © 2010 American Institute of Physics.
Alfred Wagner, Richard Haight, et al.
SPIE Photomask Technology 2002
Armin Rettenberger, Richard Haight
Physical Review Letters
Richard Haight, Alfred Wagner, et al.
FiO 2003
Evgueni Chagarov, Kasra Sardashti, et al.
Journal of Chemical Physics