Ming L. Yu, Ho-Seob Kim, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A general equation has been derived for computing the temperature distribution produced in a substrate heated by a high repetition rate pulsed laser. The theoretical predictions have been compared with experimental results obtained for etching of Mn-Zn ferrite in KOH solution using a copper vapor laser. The effects of the laser power and substrate scan speed on the temperature distribution have been investigated, and the predicted melt-zone boundaries have been compared with the experimentally observed width, depth, and shape of the etched grooves.
Ming L. Yu, Ho-Seob Kim, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Emanuel I. Cooper, Edward A. Giess, et al.
Materials Letters
Supratik Guha, Arunava Gupta, et al.
Applied Physics Letters
Arunava Gupta, Gad Koren
Applied Physics Letters