The Effect of Water on the Dielectric Constant of Vapor Deposited Silica Films

J. Tersoff

Applied Surface Science

K.A. Chao

Physical Review B

Revanth Kodoru, Atanu Saha, et al.

arXiv

P. Martensson, R.M. Feenstra

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films