J.K. Gimzewski, T.A. Jung, et al.
Surface Science
We demonstrate an energy-efficient programmable via concept using indirectly heated phase-change material. This via structure has maximum phase-change volume to achieve a minimum on resistance for high performance logic applications. Process development and material investigations for this device structure are reported. The device concept is successfully demonstrated in a standard CMOS-compatible technology capable of multiple cycles between on/off states for reconfigurable applications. © 2010 IOP Publishing Ltd.
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
R.W. Gammon, E. Courtens, et al.
Physical Review B
Ellen J. Yoffa, David Adler
Physical Review B
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.