Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
No abstract available.
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Robert C. Durbeck
IEEE TACON
Chidanand Apté, Fred Damerau, et al.
ACM Transactions on Information Systems (TOIS)