Wavefront and caustic surfaces of refractive laser beam shaper
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
In this paper we address the L∞ Voronoi diagram of polygonal objects and present applications in VLSI layout and manufacturing. We show that the L∞ Voronoi diagram of polygonal objects consists of straight line segments and thus it is much simpler to compute than its Euclidean counterpart; the degree of the computation is significantly lower. Moreover, it has a natural interpretation. In applications where Euclidean precision is not essential the L∞ Voronoi diagram can provide a better alternative. Using the L∞ Voronoi diagram of polygons we address the problem of calculating the critical area for shorts in a VLSI layout. The critical area computation is the main computational bottleneck in VLSI yield prediction.
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
Da-Ke He, Ashish Jagmohan, et al.
ISIT 2007
A.R. Conn, Nick Gould, et al.
Mathematics of Computation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000