Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
In this paper we address the L∞ Voronoi diagram of polygonal objects and present applications in VLSI layout and manufacturing. We show that the L∞ Voronoi diagram of polygonal objects consists of straight line segments and thus it is much simpler to compute than its Euclidean counterpart; the degree of the computation is significantly lower. Moreover, it has a natural interpretation. In applications where Euclidean precision is not essential the L∞ Voronoi diagram can provide a better alternative. Using the L∞ Voronoi diagram of polygons we address the problem of calculating the critical area for shorts in a VLSI layout. The critical area computation is the main computational bottleneck in VLSI yield prediction.
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
Yi Zhou, Parikshit Ram, et al.
ICLR 2023
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009