Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
In this paper we address the L∞ Voronoi diagram of polygonal objects and present applications in VLSI layout and manufacturing. We show that the L∞ Voronoi diagram of polygonal objects consists of straight line segments and thus it is much simpler to compute than its Euclidean counterpart; the degree of the computation is significantly lower. Moreover, it has a natural interpretation. In applications where Euclidean precision is not essential the L∞ Voronoi diagram can provide a better alternative. Using the L∞ Voronoi diagram of polygons we address the problem of calculating the critical area for shorts in a VLSI layout. The critical area computation is the main computational bottleneck in VLSI yield prediction.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Andrew Skumanich
SPIE Optics Quebec 1993
Minghong Fang, Zifan Zhang, et al.
CCS 2024
Hang-Yip Liu, Steffen Schulze, et al.
Proceedings of SPIE - The International Society for Optical Engineering