William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery