A. Reisman, M. Berkenblit, et al.
JES
The strain energy release rate G of a through-thickness crack in a thin film that adheres to a rigid substrate is shown to vary linearly with the film thickness at constant film stress. G is normally small, so adhered polymer films are only expected to crack in the presence of an aggressive environmental agent unless the polymer is very brittle. A minimum film thickness for cracking is likely to be observed. The propagation of crack-like defects in a polyimide in the presence of xylene was examined experimentally. The defects grew at a constant rate (independent of their length) that increased rapidly with film thickness. The minimum film thickness for defect growth was found to be about 2μm. © 1990 Chapman and Hall Ltd.
A. Reisman, M. Berkenblit, et al.
JES
John G. Long, Peter C. Searson, et al.
JES
T.N. Morgan
Semiconductor Science and Technology
Lawrence Suchow, Norman R. Stemple
JES