Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In recent mechanooptical studies with solution cast films of the aromatic copolyester of poly(ethylene terephthalate) and 60 mol % p‐acetoxybenzoic acid from 1,1,1,3,3,3‐hexafluoro‐2‐propanol, a volatile solvent with bp 59°C, we observed that the solvent plasticizes and affects considerably the stress–strain behavior of the copolyester at ambient temperature. Whereas a dry copolyester film is typically brittle failing at ≤ 10% strain, a film containing 12% w/w 1,1,1,3,3,3‐hexafluoro‐2‐propanol can be stretched readily to ≥ 300% strain. When the solvent is removed by evaporation or by heating at an elevated temperature (≥ 120°C), the films lose their ductility, indicating that the plasticization is reversible. Copyright © 1986 John Wiley & Sons, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011