Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Using continuum elasticity theory, we investigate the stability of coexisting 7×7 and '1×1' phases on Si(1 1 1) as a function of temperature. We find that of the many possible 'droplet' phases, a configuration in which triangular domains meet corner-to-side is the most stable. At fixed separation, the elastic interaction between two domains is minimized in the corner-to-side arrangement. Away from the transition temperature, the size of the domains decreases while the domain spacing diverges. © 2002 Elsevier Science B.V. All rights reserved.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
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ACS Macro Letters
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