Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The semifluorinated alkanes F(CF2)10(CH2)9H and F(CF2)10(CH2)11H both undergo a reversible transition between tilted smectic phases above room temperature as demonstrated previously for F(CF2)10(CH2)10H. The transformation on cooling is achieved in two stages: an increase in molecular tilt relative to the layer normal, followed by a change in the molecular interdigitation within each layer. The extent of complete transformation is sensitive to temperature and time, due to strains occasioned by the accompanying volume change, and because the second stage requires significant molecular translations. Characterization of the transformation is possible by transmitted light microscopy, supplemented by X-ray diffraction. © 1989 Taylor and Francis Group, LLC.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
E. Burstein
Ferroelectrics
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures