Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
The transient temperature field development during heating of an amorphous silicon (a-Si) film, deposited on a fused quartz substrate, by pulsed excimer laser irradiation is studied. Static reflectivity and transmissivity measurements are used to obtain the thin film optical properties at elevated temperatures. Experimental in-situ, transient, optical transmission data are compared with heat transfer modeling results. The variation with temperature of the material complex refractive index across the thin film thickness is taken into account. The effects of the film thickness and thermal diffusivity, as well as of the laser pulse shape, are discussed. © 1993 by ASME.
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Imran Nasim, Melanie Weber
SCML 2024