Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
The transient temperature field development during heating of an amorphous silicon (a-Si) film, deposited on a fused quartz substrate, by pulsed excimer laser irradiation is studied. Static reflectivity and transmissivity measurements are used to obtain the thin film optical properties at elevated temperatures. Experimental in-situ, transient, optical transmission data are compared with heat transfer modeling results. The variation with temperature of the material complex refractive index across the thin film thickness is taken into account. The effects of the film thickness and thermal diffusivity, as well as of the laser pulse shape, are discussed. © 1993 by ASME.
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures