U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
The transient temperature field development during heating of an amorphous silicon (a-Si) film, deposited on a fused quartz substrate, by pulsed excimer laser irradiation is studied. Static reflectivity and transmissivity measurements are used to obtain the thin film optical properties at elevated temperatures. Experimental in-situ, transient, optical transmission data are compared with heat transfer modeling results. The variation with temperature of the material complex refractive index across the thin film thickness is taken into account. The effects of the film thickness and thermal diffusivity, as well as of the laser pulse shape, are discussed. © 1993 by ASME.
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
K.N. Tu
Materials Science and Engineering: A
K.A. Chao
Physical Review B