Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The molecular dynamics simulations of Yukawa (i.e., screened-Coulomb) systems that were applied to the regime of weak screening in an earlier study [S. Hamaguchi, R. T. Farouki, and D. H. E. Dubin, J. Chem. Phys. 105, 7641 (1996)] are extended to the strong screening regime. Transition temperatures at the fluid-solid phase boundary and the solid-solid phase boundary are obtained as functions of the screening parameter [Formula Presented] (i.e., the ratio of the Wigner-Seitz radius [Formula Presented] to the Debye length [Formula Presented]). The resulting phase diagram also covers the triple point—the intersection of the fluid-solid and solid-solid phase boundaries—at [Formula Presented] and [Formula Presented] where Γ is the ratio of the Coulomb potential energy to the kinetic energy per particle (i.e., [Formula Presented] where [Formula Presented] is the charge of each Yukawa particle and [Formula Presented] is the system temperature). Yukawa systems serve as models for plasmas and colloidal suspensions of charged particulates. © 1997 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Revanth Kodoru, Atanu Saha, et al.
arXiv
Peter J. Price
Surface Science
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures