I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
No abstract available.
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Julien Autebert, Aditya Kashyap, et al.
Langmuir
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010